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Manuela Schweikert
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Seeheim-Ober Beerbach, DE
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Buffer solutions for suspensions used in chemical-mechanical polishing
Patent number
6,338,743
Issue date
Jan 15, 2002
Merck Patent Gesellschaft mit beschrankter Haftung
Claus Dusemund
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...