Manus Wong

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Lift pin assembly, an electrostatic chuck and a processing apparatu...
- Patent number 11,626,314
- Issue date Apr 11, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...
- Publication number 20210118716
- Publication date Apr 22, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...
- Publication number 20200083087
- Publication date Mar 12, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS