TREA

Mao D. Lim

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  • San Jose, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
    • Publication number 20170121813
    • Publication date May 4, 2017
    • Applied Materials, Inc.
    • Maosheng ZHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
    • Publication number 20140158048
    • Publication date Jun 12, 2014
    • Applied Materials, Inc.
    • Maosheng ZHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
    • Publication number 20100095891
    • Publication date Apr 22, 2010
    • Maosheng Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
    • Publication number 20090145360
    • Publication date Jun 11, 2009
    • Maosheng Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
    • Publication number 20060231205
    • Publication date Oct 19, 2006
    • Maosheng Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
    • Publication number 20060225767
    • Publication date Oct 12, 2006
    • Maosheng Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and apparatus for cleaning a CVD chamber
    • Publication number 20040144490
    • Publication date Jul 29, 2004
    • APPLIED MATERIALS, INC.
    • Maosheng Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...