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Mao-Yuan Shih
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Hsin-Chu City, TW
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last 30 patents
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Patent Grant
Method for whole field thin film stress evaluation
Patent number
7,403,270
Issue date
Jul 22, 2008
Instrument Technology Research Center, National Applied Laboratories
Chi Hung Huang
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method for whole field thin film stress evaluation
Publication number
20070017296
Publication date
Jan 25, 2007
Instrument Technology Research Center, National Applied Research Laboratories
Chi Hung Huang
G01 - MEASURING TESTING