Maocheng Li

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of micromachining a multi-part cavity
- Patent number 6,827,869
- Issue date Dec 7, 2004
- Dragan Podlesnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma reactor with dynamic RF inductive and capacitive coupling co...
- Patent number 6,447,636
- Issue date Sep 10, 2002
- Applied Materials, Inc.
- Xue-Yu Qian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon trench etch using silicon-containing precursors to reduce o...
- Patent number 6,380,095
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process for forming high aspect ratio trenched in silicon
- Patent number 6,127,278
- Issue date Oct 3, 2000
- Applied Materials, Inc.
- Yiqiong Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Bonded multi-layer RF window
- Publication number 20070079936
- Publication date Apr 12, 2007
- Applied Materials, Inc.
- Maocheng Li
- B32 - LAYERED PRODUCTS
Information Patent Application
Chamber component having grooved surface
- Publication number 20060188742
- Publication date Aug 24, 2006
- APPLIED MATERIALS, INC.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of micromachining a multi-part cavity
- Publication number 20020185469
- Publication date Dec 12, 2002
- Applied Materials, Inc.
- Dragan Podlesnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ICP window heater integrated with faraday shield or floating electr...
- Publication number 20020100557
- Publication date Aug 1, 2002
- APPLIED MATERIALS, INC.
- Maocheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of etching high aspect ratio openings in silicon
- Publication number 20010045354
- Publication date Nov 29, 2001
- Yiqiong Wang
- H01 - BASIC ELECTRIC ELEMENTS