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Maolin Long
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck assembly for plasma processing apparatus
Patent number
11,837,493
Issue date
Dec 5, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for reverse pulsing
Patent number
11,798,785
Issue date
Oct 24, 2023
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct frequency tuning for matchless plasma source in substrate pr...
Patent number
11,728,137
Issue date
Aug 15, 2023
Lam Research Corporation
Yuhou Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF pulsing within pulsing for semiconductor RF plasma processing
Patent number
11,728,136
Issue date
Aug 15, 2023
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
11,716,805
Issue date
Aug 1, 2023
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Frequency tuning for a matchless plasma source
Patent number
11,437,219
Issue date
Sep 6, 2022
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF pulsing within pulsing for semiconductor RF plasma processing
Patent number
11,342,159
Issue date
May 24, 2022
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
11,224,116
Issue date
Jan 11, 2022
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal contamination reduction in substrate processing systems with...
Patent number
11,056,321
Issue date
Jul 6, 2021
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct drive RF circuit for substrate processing systems
Patent number
10,847,345
Issue date
Nov 24, 2020
Lam Research Corporation
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
RF voltage sensor incorporating multiple voltage dividers for detec...
Patent number
10,784,083
Issue date
Sep 22, 2020
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for transformer coupled plasma pulsing with tra...
Patent number
10,734,195
Issue date
Aug 4, 2020
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiofrequency (RF) filter for multi-frequency RF bias
Patent number
10,715,095
Issue date
Jul 14, 2020
Lam Research Corporation
Maolin Long
G01 - MEASURING TESTING
Information
Patent Grant
Frequency tuning for a matchless plasma source
Patent number
10,672,590
Issue date
Jun 2, 2020
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cathode RF asymmetry detection probe for semiconductor RF plasma pr...
Patent number
10,649,006
Issue date
May 12, 2020
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
10,638,593
Issue date
Apr 28, 2020
Lam Research Corporation
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Direct drive RF circuit for substrate processing systems
Patent number
10,515,781
Issue date
Dec 24, 2019
Lam Research Corporation
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Powered grid for plasma chamber
Patent number
10,431,434
Issue date
Oct 1, 2019
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing systems including side coils and methods related...
Patent number
10,340,121
Issue date
Jul 2, 2019
Lam Research Corporation
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for reversing RF current polarity at one output...
Patent number
10,332,725
Issue date
Jun 25, 2019
Lam Research Corporation
Arthur H. Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
10,264,663
Issue date
Apr 16, 2019
Lam Research Corporation
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Large dynamic range RF voltage sensor and method for voltage mode R...
Patent number
10,121,641
Issue date
Nov 6, 2018
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
TCCT match circuit for plasma etch chambers
Patent number
10,056,231
Issue date
Aug 21, 2018
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Powered grid for plasma chamber
Patent number
9,966,236
Issue date
May 8, 2018
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with thermal choke
Patent number
9,805,963
Issue date
Oct 31, 2017
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for reverse pulsing
Patent number
9,761,459
Issue date
Sep 12, 2017
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for reverse pulsing
Patent number
9,583,357
Issue date
Feb 28, 2017
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transformer coupled capacitive tuning circuit with fast impedance s...
Patent number
9,515,633
Issue date
Dec 6, 2016
Lam Research Corporation
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Internal Faraday shield having distributed chevron patterns and cor...
Patent number
9,490,106
Issue date
Nov 8, 2016
Lam Research Corporation
John Drewery
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hammerhead TCP coil support for high RF power conductor etch systems
Patent number
9,384,948
Issue date
Jul 5, 2016
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS
Publication number
20240096680
Publication date
Mar 21, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR REVERSE PULSING
Publication number
20240030000
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
Publication number
20230360883
Publication date
Nov 9, 2023
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION
Publication number
20230354502
Publication date
Nov 2, 2023
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Protection System for Switches in Direct Drive Circuits of Substrat...
Publication number
20230245873
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC WINDOW FOR SUBSTRATE PROCESSING CHAMBER
Publication number
20230126058
Publication date
Apr 27, 2023
LAM RESEARCH CORPORATION
Maolin LONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF REFERENCE MEASURING CIRCUIT FOR A DIRECT DRIVE SYSTEM SUPPLYING...
Publication number
20230113683
Publication date
Apr 13, 2023
LAM RESEARCH CORPORATION
Maolin LONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Conductive Member for Cleaning Focus Ring of a Plasma Processing Ap...
Publication number
20230071494
Publication date
Mar 9, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pressure Control System for a Multi-Head Processing Chamber of a Pl...
Publication number
20230012873
Publication date
Jan 19, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lift Pin Assembly for a Plasma Processing Apparatus
Publication number
20230010075
Publication date
Jan 12, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Changle Guan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS
Publication number
20230005778
Publication date
Jan 5, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Apparatus
Publication number
20220415619
Publication date
Dec 29, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Hybrid Plasma Source Array
Publication number
20220384144
Publication date
Dec 1, 2022
Beijing E-Town Semiconductor Technology Co., LTD
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP...
Publication number
20220344130
Publication date
Oct 27, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
Publication number
20220254608
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS
Publication number
20220216038
Publication date
Jul 7, 2022
LAM RESEARCH CORPORATION
Ying Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Grid Assembly for Plasma Processing Apparatus
Publication number
20220208514
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Directly Driven Hybrid ICP-CCP Plasma Source
Publication number
20220208518
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Configurable Faraday Shield
Publication number
20220208529
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic Chuck Assembly for Plasma Processing Apparatus
Publication number
20220208591
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Outer Gas Channel Insert
Publication number
20220208523
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cooled Shield for ICP Source
Publication number
20220208527
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Induction Coil Assembly for Plasma Processing Apparatus
Publication number
20220208512
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL-FREQUENCY, DIRECT-DRIVE INDUCTIVELY COUPLED PLASMA SOURCE
Publication number
20220199365
Publication date
Jun 23, 2022
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION
Publication number
20220117074
Publication date
Apr 14, 2022
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Strip Tool With Movable Insert
Publication number
20220068611
Publication date
Mar 3, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
B08 - CLEANING
Information
Patent Application
METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH...
Publication number
20210327689
Publication date
Oct 21, 2021
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECT FREQUENCY TUNING FOR MATCHLESS PLASMA SOURCE IN SUBSTRATE PR...
Publication number
20210210314
Publication date
Jul 8, 2021
LAM RESEARCH CORPORATION
Yuhou WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
Publication number
20200335305
Publication date
Oct 22, 2020
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Frequency Tuning for a Matchless Plasma Source
Publication number
20200286713
Publication date
Sep 10, 2020
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS