Marc Beck

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Lund, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for large area lithography
- Patent number 8,147,235
- Issue date Apr 3, 2012
- Obducat AB
- Babak Heidari
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Device and method for large area lithography
- Publication number 20070018362
- Publication date Jan 25, 2007
- Babak Heidari
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR