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Marc de Leeuwe
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Tucson, AZ, US
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last 30 patents
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Patent Application
Removal of CMP and post-CMP residue from semiconductors using super...
Publication number
20040142564
Publication date
Jul 22, 2004
William H. Mullee
B08 - CLEANING
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Patent Application
Removal of CMP residue from semiconductor substrate using supercrit...
Publication number
20020086537
Publication date
Jul 4, 2002
Supercritical Systems Inc.
William H. Mullee
H01 - BASIC ELECTRIC ELEMENTS