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Marc Demand
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Saint-Jean-Geest, BE
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Patents Grants
last 30 patents
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Patent Grant
Use of F-based gate etch to passivate the high-k/metal gate stack f...
Patent number
8,319,295
Issue date
Nov 27, 2012
IMEC
Nadine Collaert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma composition for selective high-k etch
Patent number
7,598,184
Issue date
Oct 6, 2009
IMEC
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective removal of rare earth based high-k materials in a semicon...
Patent number
7,521,369
Issue date
Apr 21, 2009
Interuniversitair Microelektronica Centrum (IMEC)
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning of doped poly-silicon gates
Patent number
7,390,708
Issue date
Jun 24, 2008
Interuniversitair Microelektronica Centrum (IMEC) VZW
Marc Demand
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
USE OF F-BASED GATE ETCH TO PASSIVATE THE HIGH-K/METAL GATE STACK F...
Publication number
20080164539
Publication date
Jul 10, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Nadine Collaert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE REMOVAL OF RARE EARTH BASED HIGH-K MATERIALS IN A SEMICON...
Publication number
20080096374
Publication date
Apr 24, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING OF DOPED POLY-SILICON GATES
Publication number
20080096372
Publication date
Apr 24, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Marc Demand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma for patterning advanced gate stacks
Publication number
20070099428
Publication date
May 3, 2007
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma composition for selective high-k etch
Publication number
20070099403
Publication date
May 3, 2007
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS