TREA

Marc Estoque

Follow

Person

  • San Jose, CA, US
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Edge ring centering method using ring dynamic alignment data
    • Patent number 10,541,168
    • Issue date Jan 21, 2020
    • Lam Research Corporation
    • Ali Sucipto Tan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Front opening ring pod
    • Patent number 10,062,589
    • Issue date Aug 28, 2018
    • Lam Research Corporation
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Front opening ring pod
    • Patent number 10,062,590
    • Issue date Aug 28, 2018
    • Lam Research Corporation
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Front opening ring pod
    • Patent number 9,881,820
    • Issue date Jan 30, 2018
    • Lam Research Corporation
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    HIGH PRECISION EDGE RING CENTERING FOR SUBSTRATE PROCESSING SYSTEMS
    • Publication number 20230369025
    • Publication date Nov 16, 2023
    • LAM RESEARCH CORPORATION
    • Hui Ling HAN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA
    • Publication number 20180138069
    • Publication date May 17, 2018
    • LAM RESEARCH CORPORATION
    • Ali Sucipto Tan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Front Opening Ring Pod
    • Publication number 20180068879
    • Publication date Mar 8, 2018
    • LAM RESEARCH CORPORATION
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Front Opening Ring Pod
    • Publication number 20180040492
    • Publication date Feb 8, 2018
    • LAM RESEARCH CORPORATION
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Front Opening Ring Pod
    • Publication number 20180019142
    • Publication date Jan 18, 2018
    • LAM RESEARCH CORPORATION
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Front Opening Ring Pod
    • Publication number 20170117170
    • Publication date Apr 27, 2017
    • LAM RESEARCH CORPORATION
    • Scott Wong
    • H01 - BASIC ELECTRIC ELEMENTS