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Marc HAUPTMANN
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Leuven, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,782,349
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,592,753
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,327,407
Issue date
May 10, 2022
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for optimization of lithographic process
Patent number
11,099,487
Issue date
Aug 24, 2021
ASML Netherlands B.V.
Marc Hauptmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process
Patent number
10,877,381
Issue date
Dec 29, 2020
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
Patent number
10,613,445
Issue date
Apr 7, 2020
ASML Netherlands B.V.
Marc Hauptmann
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for obtaining diagnostic information relating...
Patent number
10,241,418
Issue date
Mar 26, 2019
ASML Netherlands B.V.
Marc Hauptmann
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...
Publication number
20240134283
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Niek Willem KLEIN KOERKAMP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20230168591
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20220236647
Publication date
Jul 28, 2022
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20220229373
Publication date
Jul 21, 2022
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR GENERATING A CONTROL SCHEME AND DEVICE MANUFACTURING METHOD
Publication number
20220187786
Publication date
Jun 16, 2022
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS
Publication number
20210349402
Publication date
Nov 11, 2021
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20210080836
Publication date
Mar 18, 2021
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS
Publication number
20200050180
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Weitian KOU
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS
Publication number
20200026201
Publication date
Jan 23, 2020
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
Publication number
20200019067
Publication date
Jan 16, 2020
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...
Publication number
20190219929
Publication date
Jul 18, 2019
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G01 - MEASURING TESTING
Information
Patent Application
METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO...
Publication number
20170363969
Publication date
Dec 21, 2017
ASML Netherlands B.V.
Marc HAUPTMANN
G01 - MEASURING TESTING