Marc HAUPTMANN

Person

Leuven, BE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for generating a control scheme and device manufacturing method
- Patent number 12,085,913
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Marc Hauptmann
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for optimization of lithographic process
- Patent number 12,044,981
- Issue date Jul 23, 2024
- ASML Netherlands B.V.
- Marc Hauptmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,782,349
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,592,753
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,327,407
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for optimization of lithographic process
- Patent number 11,099,487
- Issue date Aug 24, 2021
- ASML Netherlands B.V.
- Marc Hauptmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process
- Patent number 10,877,381
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 10,613,445
- Issue date Apr 7, 2020
- ASML Netherlands B.V.
- Marc Hauptmann
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for obtaining diagnostic information relating...
- Patent number 10,241,418
- Issue date Mar 26, 2019
- ASML Netherlands B.V.
- Marc Hauptmann
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...
- Publication number 20240231233
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Niek Willem KLEIN KOERKAMP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...
- Publication number 20240134283
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Niek Willem KLEIN KOERKAMP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20230168591
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CONTROLLING A SEMICONDUCTOR MANUFACTURING PROCESS
- Publication number 20220236647
- Publication date Jul 28, 2022
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20220229373
- Publication date Jul 21, 2022
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR GENERATING A CONTROL SCHEME AND DEVICE MANUFACTURING METHOD
- Publication number 20220187786
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS
- Publication number 20210349402
- Publication date Nov 11, 2021
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20210080836
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS
- Publication number 20200050180
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS
- Publication number 20200026201
- Publication date Jan 23, 2020
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
- Publication number 20200019067
- Publication date Jan 16, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...
- Publication number 20190219929
- Publication date Jul 18, 2019
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G01 - MEASURING TESTING
Information Patent Application
METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO...
- Publication number 20170363969
- Publication date Dec 21, 2017
- ASML Netherlands B.V.
- Marc HAUPTMANN
- G01 - MEASURING TESTING

Marc HAUPTMANN

Person

Patents Grantslast 30 patents

Method for generating a control scheme and device manufacturing method

Method and apparatus for optimization of lithographic process

Methods of determining corrections for a patterning process, device...

Methods of determining corrections for a patterning process, device...

Methods of determining corrections for a patterning process, device...

Method and apparatus for optimization of lithographic process

Methods of determining corrections for a patterning process

Methods and apparatus for obtaining diagnostic information relating...

Method and apparatus for obtaining diagnostic information relating...

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...

METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHOD FOR CONTROLLING A SEMICONDUCTOR MANUFACTURING PROCESS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHOD FOR GENERATING A CONTROL SCHEME AND DEVICE MANUFACTURING METHOD

METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS

METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS

METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...

METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO...