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Marc Hubertus Lorenz Van Der Velden
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
7,928,412
Issue date
Apr 19, 2011
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
7,629,594
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, system and device manufacturing method
Patent number
7,491,951
Issue date
Feb 17, 2009
ASML Netherlands B.V.
Marc Hubertus Lorenz Van Der Velden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,279,690
Issue date
Oct 9, 2007
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Lithographic Apparatus, and Device Manufacturing Method
Publication number
20090173360
Publication date
Jul 9, 2009
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus VAN HERPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, and device manufacturing method
Publication number
20080083885
Publication date
Apr 10, 2008
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY