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Marc Kirch
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Optical element having a plurality of reflective facet elements
Patent number
9,063,336
Issue date
Jun 23, 2015
Carl Zeiss SMT GmbH
Marc Kirch
G02 - OPTICS
Information
Patent Grant
Illumination optics for EUV microlithography and related system and...
Patent number
8,587,767
Issue date
Nov 19, 2013
Carl Zeiss SMT GmbH
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical unit for EUV microlithography
Patent number
8,395,754
Issue date
Mar 12, 2013
Carl Zeiss SMT GmbH
Martin Endres
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL ELEMENT HAVING A PLURALITY OF REFLECTIVE FACET ELEMENTS
Publication number
20120293785
Publication date
Nov 22, 2012
Carl Zeiss SMT GMBH
Marc Kirch
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL UNIT FOR EUV MICROLITHOGRAPHY
Publication number
20110141445
Publication date
Jun 16, 2011
Carl Zeiss SMT GMBH
Martin Endres
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...
Publication number
20110063598
Publication date
Mar 17, 2011
Carl Zeiss SMT GMBH
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY