Marc Smits

Person

Punacker, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 12,202,019
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 11,738,376
- Issue date Aug 29, 2023
- ASML Netherlands, B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 10,987,705
- Issue date Apr 27, 2021
- ASML Netherlands B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 10,632,509
- Issue date Apr 28, 2020
- ASML Netherlands B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 9,981,293
- Issue date May 29, 2018
- Mapper Lithography IP B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Method and apparatus for predicting a growth rate of deposited cont...
- Patent number 9,506,881
- Issue date Nov 29, 2016
- Mapper Lithography IP B.V.
- Marc Smits
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Arrangement for transporting radicals
- Patent number 9,484,187
- Issue date Nov 1, 2016
- Mapper Lithography IP B.V.
- Pieter Kruit
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma generator
- Patent number 9,224,580
- Issue date Dec 29, 2015
- MAPPER LITOHGRAPHY IP B.V.
- Marc Smits
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement and method for transporting radicals
- Patent number 9,123,507
- Issue date Sep 1, 2015
- Mapper Lithography IP B.V.
- Pieter Kruit
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20240017301
- Publication date Jan 18, 2024
- ASML NETHERLANDS B.V.
- Marc SMITS
- B08 - CLEANING
Information Patent Application
ACTUATOR ARRANGEMENT AND ELECTRON-OPTICAL COLUMN
- Publication number 20230207252
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Derk Ferdinand WALVOORT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20230107989
- Publication date Apr 6, 2023
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACK ALIGNMENT TECHNIQUES
- Publication number 20230020745
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Arjen Benjamin STORM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20210391139
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20210237129
- Publication date Aug 5, 2021
- ASML NETHERLANDS B.V.
- Marc SMITS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20200230665
- Publication date Jul 23, 2020
- ASML Netherlands B.V.
- Marc SMITS
- B08 - CLEANING
Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20180236505
- Publication date Aug 23, 2018
- MAPPER LITHOGRAPHY IP BV
- Marc Smits
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
- Publication number 20170304878
- Publication date Oct 26, 2017
- MAPPER LITHOGRAPHY IP BV
- Marc Smits
- B08 - CLEANING
Information Patent Application
Arrangement for transporting radicals
- Publication number 20150332899
- Publication date Nov 19, 2015
- MAPPER LITHOGRAPHY IP BV
- Pieter KRUIT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Predicting a Growth Rate of Deposited Cont...
- Publication number 20150060701
- Publication date Mar 5, 2015
- MAPPER LITHOGRAPHY IP BV
- Marc Smits
- G01 - MEASURING TESTING
Information Patent Application
Arrangement and method for transporting radicals
- Publication number 20150028223
- Publication date Jan 29, 2015
- MAPPER LITHOGRAPHY IP BV
- Pieter Kruit
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
PLASMA GENERATOR
- Publication number 20140252953
- Publication date Sep 11, 2014
- Marc Smits
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR
- Publication number 20140231667
- Publication date Aug 21, 2014
- Marc Smits
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method and system for the removal and/or avoidance of contamination...

Replaceable module for a charged particle apparatus

Method and system for the removal and/or avoidance of contamination...

Method and system for the removal and/or avoidance of contamination...

Method and system for the removal and/or avoidance of contamination...

Method and system for the removal and/or avoidance of contamination...

Method and apparatus for predicting a growth rate of deposited cont...

Arrangement for transporting radicals

Plasma generator

Arrangement and method for transporting radicals

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

ACTUATOR ARRANGEMENT AND ELECTRON-OPTICAL COLUMN

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

STACK ALIGNMENT TECHNIQUES

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...

Arrangement for transporting radicals

Method and Apparatus for Predicting a Growth Rate of Deposited Cont...

Arrangement and method for transporting radicals

PLASMA GENERATOR

PLASMA GENERATOR