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Marc Smits
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Punacker, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
11,738,376
Issue date
Aug 29, 2023
ASML Netherlands, B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
10,987,705
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
10,632,509
Issue date
Apr 28, 2020
ASML Netherlands B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
9,981,293
Issue date
May 29, 2018
Mapper Lithography IP B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method and apparatus for predicting a growth rate of deposited cont...
Patent number
9,506,881
Issue date
Nov 29, 2016
Mapper Lithography IP B.V.
Marc Smits
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Arrangement for transporting radicals
Patent number
9,484,187
Issue date
Nov 1, 2016
Mapper Lithography IP B.V.
Pieter Kruit
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Plasma generator
Patent number
9,224,580
Issue date
Dec 29, 2015
MAPPER LITOHGRAPHY IP B.V.
Marc Smits
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement and method for transporting radicals
Patent number
9,123,507
Issue date
Sep 1, 2015
Mapper Lithography IP B.V.
Pieter Kruit
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
ACTUATOR ARRANGEMENT AND ELECTRON-OPTICAL COLUMN
Publication number
20230207252
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Derk Ferdinand WALVOORT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
Publication number
20230107989
Publication date
Apr 6, 2023
ASML NETHERLANDS B.V.
Christiaan OTTEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STACK ALIGNMENT TECHNIQUES
Publication number
20230020745
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Arjen Benjamin STORM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
Publication number
20210391139
Publication date
Dec 16, 2021
ASML NETHERLANDS B.V.
Christiaan OTTEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20210237129
Publication date
Aug 5, 2021
ASML NETHERLANDS B.V.
Marc SMITS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20200230665
Publication date
Jul 23, 2020
ASML Netherlands B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20180236505
Publication date
Aug 23, 2018
MAPPER LITHOGRAPHY IP BV
Marc Smits
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20170304878
Publication date
Oct 26, 2017
MAPPER LITHOGRAPHY IP BV
Marc Smits
B08 - CLEANING
Information
Patent Application
Arrangement for transporting radicals
Publication number
20150332899
Publication date
Nov 19, 2015
MAPPER LITHOGRAPHY IP BV
Pieter KRUIT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Predicting a Growth Rate of Deposited Cont...
Publication number
20150060701
Publication date
Mar 5, 2015
MAPPER LITHOGRAPHY IP BV
Marc Smits
G01 - MEASURING TESTING
Information
Patent Application
Arrangement and method for transporting radicals
Publication number
20150028223
Publication date
Jan 29, 2015
MAPPER LITHOGRAPHY IP BV
Pieter Kruit
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
PLASMA GENERATOR
Publication number
20140252953
Publication date
Sep 11, 2014
Marc Smits
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATOR
Publication number
20140231667
Publication date
Aug 21, 2014
Marc Smits
H01 - BASIC ELECTRIC ELEMENTS