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Marc T. Aho
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Automated spatial flipping apparatus and system for photomasks and...
Patent number
7,962,242
Issue date
Jun 14, 2011
n&k Technology Inc.
Marc T. Aho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compact multiple diameters wafer handling system with on-chuck wafe...
Patent number
7,717,661
Issue date
May 18, 2010
n&k Technology, Inc.
Marc T. Aho
G01 - MEASURING TESTING
Information
Patent Grant
System and method for optical photomask inspection through pellicle
Patent number
7,679,736
Issue date
Mar 16, 2010
n&k Technology, Inc.
Marc T. Aho
G01 - MEASURING TESTING
Information
Patent Grant
Disc clamping device for multiple standard discs
Patent number
7,616,301
Issue date
Nov 10, 2009
n&k Technology, Inc.
Marc Aho
G11 - INFORMATION STORAGE
Information
Patent Grant
Apparatus and method for examining a disk-shaped sample on an X-Y-t...
Patent number
7,397,554
Issue date
Jul 8, 2008
n&k Technology, Inc.
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Grant
System and method for high intensity small spot optical metrology
Patent number
7,349,103
Issue date
Mar 25, 2008
n & k Technology, Inc.
Mehdi Balooch
G01 - MEASURING TESTING
Information
Patent Grant
Spectrophotometric system with reduced angle of incidence
Patent number
7,330,256
Issue date
Feb 12, 2008
n & k Technology, Inc.
Marc Aho
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for optical characterization of a sample over...
Patent number
7,327,457
Issue date
Feb 5, 2008
n & k Technology, Inc.
Ray Hebert
G02 - OPTICS
Information
Patent Grant
Apparatus and method for optical characterization of a sample over...
Patent number
7,248,364
Issue date
Jul 24, 2007
n & k Technology, Inc.
Ray Hebert
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Disc clamping device for multiple standard discs
Publication number
20060017915
Publication date
Jan 26, 2006
Marc Aho
G11 - INFORMATION STORAGE
Information
Patent Application
Apparatus and method for optical characterization of a sample over...
Publication number
20050134847
Publication date
Jun 23, 2005
Ray Hebert
G02 - OPTICS
Information
Patent Application
Apparatus and method for optical characterization of a sample over...
Publication number
20050134848
Publication date
Jun 23, 2005
Ray Hebert
G02 - OPTICS
Information
Patent Application
Compact wafer handling system with single axis robotic arm and prea...
Publication number
20050111944
Publication date
May 26, 2005
Marc Aho
H01 - BASIC ELECTRIC ELEMENTS