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Marc Tricard
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Glastonbury, CT, US
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last 30 patents
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Patent Grant
Photo-masks for lithography
Patent number
9,411,222
Issue date
Aug 9, 2016
Zygo Corporation
Marc Tricard
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
PHOTO-MASKS FOR LITHOGRAPHY
Publication number
20150286129
Publication date
Oct 8, 2015
Zygo Corporation
Marc Tricard
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR