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Marc Van Kemenade
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Waalre, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method to determine...
Patent number
8,908,152
Issue date
Dec 9, 2014
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,711,329
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Marc Van Kemenade
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment mark and a method of aligning a substrate comprising such...
Patent number
8,208,121
Issue date
Jun 26, 2012
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPH...
Publication number
20120218533
Publication date
Aug 30, 2012
ASML NETHERLANDS B.V.
Irina LYULINA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20120057142
Publication date
Mar 8, 2012
ASML NETHERLANDS B.V.
Marc Van Kemenade
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20100123886
Publication date
May 20, 2010
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper BIJNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Mark and a Method of Aligning a Substrate Comprising Such...
Publication number
20090195768
Publication date
Aug 6, 2009
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY