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Marc Wilhelmus Maria VAN DER WIJST
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Projection system and mirror and radiation source for a lithographi...
Patent number
11,150,560
Issue date
Oct 19, 2021
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Grant
Projection system and mirror and radiation source for a lithographi...
Patent number
10,732,511
Issue date
Aug 4, 2020
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,649,347
Issue date
May 12, 2020
ASML Netherlands B.V.
Michael Johannes Christiaan Ronde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus and device manufacturing method
Patent number
10,551,751
Issue date
Feb 4, 2020
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,409,175
Issue date
Sep 10, 2019
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and minor and radiation source for a lithographic...
Patent number
10,216,093
Issue date
Feb 26, 2019
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
10,191,393
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Jan Steven Christiaan Westerlaken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,146,133
Issue date
Dec 4, 2018
ASML Netherlands B.V.
Wilhelmus Patrick Elisabeth Maria Op 'T Root
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
10,114,299
Issue date
Oct 30, 2018
ASML Netherlands B.V.
Günes Nakiboglu
G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information
Patent Grant
Imprint lithographic apparatus and imprint lithographic method
Patent number
9,715,171
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Hans Butler
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,696,630
Issue date
Jul 4, 2017
ASML Netherlands B.V.
Marc Wilhelmus Maria Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,494,869
Issue date
Nov 15, 2016
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with actuator to compensate acoustic vibration
Patent number
9,378,722
Issue date
Jun 28, 2016
ASML Netherlands B.V.
Hans Butler
G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,134,632
Issue date
Sep 15, 2015
ASML Netherlands B.V.
Marc Wilhelmus Maria Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning system, lithographic apparatus and device manufacturing...
Patent number
9,122,173
Issue date
Sep 1, 2015
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,994,919
Issue date
Mar 31, 2015
ASML Netherlands B.V.
Hans Butler
G05 - CONTROLLING REGULATING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,908,144
Issue date
Dec 9, 2014
ASML Netherlands B.V.
Rogier Herman Mathijs Groeneveld
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for correcting a position of a st...
Patent number
8,781,775
Issue date
Jul 15, 2014
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for damping an object, an active damping system, and a litho...
Patent number
8,619,232
Issue date
Dec 31, 2013
ASML Netherlands B.V.
Hans Butler
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,553,199
Issue date
Oct 8, 2013
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus having a feed forward pressure pulse compens...
Patent number
8,493,553
Issue date
Jul 23, 2013
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement system and lithographic apparatus for measuring a posit...
Patent number
8,457,385
Issue date
Jun 4, 2013
ASML Netherlands B.V.
Marc Wilhelmus Maria Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with gas pressure means for controlling a pl...
Patent number
8,368,868
Issue date
Feb 5, 2013
ASML Netherlands B.V.
Johannes Petrus Martinus Bernardus Vermeulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,307,262
Issue date
Dec 11, 2007
ASML Netherlands B.V.
Antonius Johannes Josephus Van Dijsseldonk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,788,386
Issue date
Sep 7, 2004
ASML Netherlands B.V.
Hendrikus Herman Marie Cox
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD
Publication number
20230279919
Publication date
Sep 7, 2023
Carl Zeiss SMT GMBH
Alexander Petrus Josephus VAN LANKVELT
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20200285155
Publication date
Sep 10, 2020
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G02 - OPTICS
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20190171109
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190129317
Publication date
May 2, 2019
ASML NETHERLANDS B.V.
Michael RONDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20180203362
Publication date
Jul 19, 2018
ASML NETHERLANDS B.V.
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus
Publication number
20180101099
Publication date
Apr 12, 2018
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20180059555
Publication date
Mar 1, 2018
ASML NETHERLANDS B.V.
Jan Steven Christiaan WESTERLAKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus
Publication number
20170090296
Publication date
Mar 30, 2017
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160238953
Publication date
Aug 18, 2016
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20160004170
Publication date
Jan 7, 2016
ASML NETHERLANDS B.V.
Marc Wilhelmus Maria VAN DER WIJST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20150323872
Publication date
Nov 12, 2015
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150098073
Publication date
Apr 9, 2015
ASML NETHERLANDS B.V.
Hans Butler
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140340666
Publication date
Nov 20, 2014
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System, Lithographic Apparatus, Method of Projecting a B...
Publication number
20140293251
Publication date
Oct 2, 2014
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of reducing noise in an original signal, and signal processi...
Publication number
20090027648
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Marc Wilhelmus Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060139598
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Antonius Johannes Josephus Van Dijsseldonk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device menufacturing method
Publication number
20060060799
Publication date
Mar 23, 2006
ASML NETHERLANDS B.V.
Dominicus Jacobus Petrus Adrianus Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and integrated circuit manufacturing method
Publication number
20050024611
Publication date
Feb 3, 2005
ASML NETHERLANDS B.V.
Pertrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050018154
Publication date
Jan 27, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20030197914
Publication date
Oct 23, 2003
Hendrikus Herman Marie Cox
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY