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Marcel BECKERS
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Waalre, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,802,410
Issue date
Oct 13, 2020
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
10,649,341
Issue date
May 12, 2020
ASML Netherlands B.V.
Clemens Johannes Gerardus Van den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,495,984
Issue date
Dec 3, 2019
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,209,629
Issue date
Feb 19, 2019
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,088,755
Issue date
Oct 2, 2018
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, drying device, metrology apparatus and devi...
Patent number
10,018,925
Issue date
Jul 10, 2018
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for compensating for an exposure error, a device manufacturi...
Patent number
9,983,489
Issue date
May 29, 2018
ASML Netherlands B.V.
Christianus Wilhelmus Johannes Berendsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,857,695
Issue date
Jan 2, 2018
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,715,179
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, drying device, metrology apparatus and devi...
Patent number
9,606,429
Issue date
Mar 28, 2017
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,477,158
Issue date
Oct 25, 2016
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,465,302
Issue date
Oct 11, 2016
ASML Netherlands B.V.
Clemens Johannes Gerardus Van den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,429,853
Issue date
Aug 30, 2016
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,182,678
Issue date
Nov 10, 2015
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,036,127
Issue date
May 19, 2015
ASML Netherlands B.V.
Clemens Johannes Gerardus Van den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,988,651
Issue date
Mar 24, 2015
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,976,334
Issue date
Mar 10, 2015
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,958,054
Issue date
Feb 17, 2015
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, drying device, metrology apparatus and devi...
Patent number
8,953,142
Issue date
Feb 10, 2015
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods relating to immersion lithography and an immersion lithogra...
Patent number
8,587,762
Issue date
Nov 19, 2013
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,462,314
Issue date
Jun 11, 2013
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
8,451,423
Issue date
May 28, 2013
ASML Netherlands B.V.
Franciscus Johannes Joseph Janssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,427,629
Issue date
Apr 23, 2013
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
8,421,996
Issue date
Apr 16, 2013
ASML Netherlands B.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,259,287
Issue date
Sep 4, 2012
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,233,134
Issue date
Jul 31, 2012
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,004,654
Issue date
Aug 23, 2011
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,808,614
Issue date
Oct 5, 2010
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
7,804,577
Issue date
Sep 28, 2010
ASML Netherlands B.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for manufacturing a device
Patent number
7,542,127
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190179232
Publication date
Jun 13, 2019
ASML NETHERLANDS B.V.
Marcel BECKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20180292762
Publication date
Oct 11, 2018
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180081285
Publication date
Mar 22, 2018
ASML NETHERLANDS B.V.
Marcel BECKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170285489
Publication date
Oct 5, 2017
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20170192365
Publication date
Jul 6, 2017
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method For Compensating for an Exposure Error, a Device Manufacturi...
Publication number
20170115578
Publication date
Apr 27, 2017
ASML NETHERLANDS B.V.
Christianus Wilhelmus Johannes BERENDSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170038695
Publication date
Feb 9, 2017
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20170023870
Publication date
Jan 26, 2017
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160370713
Publication date
Dec 22, 2016
ASML NETHERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160054647
Publication date
Feb 25, 2016
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150309420
Publication date
Oct 29, 2015
ASML NETHERLANDS B.V.
Marcel BECKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20150234294
Publication date
Aug 20, 2015
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20150015857
Publication date
Jan 15, 2015
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120274912
Publication date
Nov 1, 2012
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120008118
Publication date
Jan 12, 2012
ASML NETHERLANDS B.V.
Marcel BECKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120008116
Publication date
Jan 12, 2012
ASML NETERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110273695
Publication date
Nov 10, 2011
ASML NETHERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20100321653
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321651
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
Carlo Cornelis Maria LUIJTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20100045950
Publication date
Feb 25, 2010
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20090316121
Publication date
Dec 24, 2009
ASML NETHERLANDS B.V.
Franciscus Johannes Joseph JANSSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20090262318
Publication date
Oct 22, 2009
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090153823
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Carlo Cornelis Maria LUIJTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090103062
Publication date
Apr 23, 2009
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS RELATING TO IMMERSION LITHOGRAPHY AND AN IMMERSION LITHOGRA...
Publication number
20090086175
Publication date
Apr 2, 2009
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090059192
Publication date
Mar 5, 2009
ASML NETHERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080273182
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080212051
Publication date
Sep 4, 2008
ASML NETHERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070242243
Publication date
Oct 18, 2007
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for manufacturing a device
Publication number
20070139629
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY