Marcel Koenraad Marie Baggen

Person

Nuenen, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate positioning device and electron beam inspection tool
- Patent number 11,621,142
- Issue date Apr 4, 2023
- ASML Netherlands B.V.
- Marcel Koenraad Marie Baggen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interferometric stage positioning apparatus
- Patent number 11,476,077
- Issue date Oct 18, 2022
- ASML Netherlands B.V.
- Marcel Koenraad Marie Baggen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam apparatus
- Patent number 11,315,752
- Issue date Apr 26, 2022
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection apparatus stage positioning
- Patent number 11,302,512
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Marcel Koenraad Marie Baggen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam apparatus
- Patent number 10,867,770
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage system and metrology tool
- Patent number 10,809,634
- Issue date Oct 20, 2020
- ASML Netherlands B.V.
- Peter Paul Hempenius
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 10,191,393
- Issue date Jan 29, 2019
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and stage system
- Patent number 9,097,990
- Issue date Aug 4, 2015
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with gas pressure means for controlling a pl...
- Patent number 8,368,868
- Issue date Feb 5, 2013
- ASML Netherlands B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,707,530
- Issue date Mar 16, 2004
- ASML Netherlands B.V.
- Raymond Laurentius Johannes Schrijver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Purge gas systems for use in lithographic projection apparatus
- Patent number 6,542,220
- Issue date Apr 1, 2003
- ASML Netherlands, B.V.
- Raymond L. J. Schrijver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
INTERFACE PLATE, INSPECTION SYSTEM AND METHOD OF INSTALLING AN INSP...
- Publication number 20230152717
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
E-BEAM APPARATUS
- Publication number 20210151282
- Publication date May 20, 2021
- Peter Paul HEMPENIUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITIONING DEVICE AND ELECTRON BEAM INSPECTION TOOL
- Publication number 20200373118
- Publication date Nov 26, 2020
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT...
- Publication number 20200303158
- Publication date Sep 24, 2020
- ASML NETHERLANDS B.V.
- Niels Johannes Maria Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFEROMETRIC STAGE POSITIONING APPARATUS
- Publication number 20200234911
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION APPARATUS STAGE POSITIONING
- Publication number 20200203118
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM APPARATUS
- Publication number 20190341224
- Publication date Nov 7, 2019
- ASML Netherlands B.V.
- Peter Paul HEMPENIUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage System and Metrology Tool
- Publication number 20180267410
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Peter Paul HEMPENIUS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20180059555
- Publication date Mar 1, 2018
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and stage apparatus
- Publication number 20070188724
- Publication date Aug 16, 2007
- ASML NETHERLANDS B.V.
- Fransicus Mathijs Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070182947
- Publication date Aug 9, 2007
- ASML NETHERLANDS B.V.
- Peter Hempenius
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, lithographic apparatus and device manufacturing me...
- Publication number 20060279721
- Publication date Dec 14, 2006
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie Baggen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
- Publication number 20050140949
- Publication date Jun 30, 2005
- ASML NETHERLANDS B.V.
- Johannes Christiaan Maria Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020180940
- Publication date Dec 5, 2002
- Raymond Laurentius Johannes Schrijver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marcel Koenraad Marie Baggen

Person

Patents Grantslast 30 patents

Substrate positioning device and electron beam inspection tool

Interferometric stage positioning apparatus

E-beam apparatus

Electron beam inspection apparatus stage positioning

E-beam apparatus

Stage system and metrology tool

Lithographic apparatus, and device manufacturing method

Lithographic apparatus and stage system

Lithographic apparatus with gas pressure means for controlling a pl...

Lithographic apparatus, device manufacturing method, and device man...

Purge gas systems for use in lithographic projection apparatus

Patents Applicationslast 30 patents

INTERFACE PLATE, INSPECTION SYSTEM AND METHOD OF INSTALLING AN INSP...

E-BEAM APPARATUS

SUBSTRATE POSITIONING DEVICE AND ELECTRON BEAM INSPECTION TOOL

ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT...

INTERFEROMETRIC STAGE POSITIONING APPARATUS

ELECTRON BEAM INSPECTION APPARATUS STAGE POSITIONING

E-BEAM APPARATUS

Stage System and Metrology Tool

LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

Lithographic apparatus and stage apparatus

Lithographic apparatus and device manufacturing method

Stage apparatus, lithographic apparatus and device manufacturing me...

Lithographic apparatus, device manufacturing methods, mask and meth...

Lithographic apparatus, device manufacturing method, and device man...