Marcel Mathijs Theodore Marie Dierichs

Person

Venlo, NL

People

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070115449
- Publication date May 24, 2007
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Maria Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method and a substrate
- Publication number 20070103655
- Publication date May 10, 2007
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070046915
- Publication date Mar 1, 2007
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060119824
- Publication date Jun 8, 2006
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060072088
- Publication date Apr 6, 2006
- ASML NETHERLANDS B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diffuser unit, lithographic apparatus, method for homogenizing a be...
- Publication number 20060012770
- Publication date Jan 19, 2006
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Use of a reticle absorber material in reducing aberrations
- Publication number 20050221238
- Publication date Oct 6, 2005
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B82 - NANO-TECHNOLOGY
Information Patent Application
Device manufacturing method and a substrate
- Publication number 20050175940
- Publication date Aug 11, 2005
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050175776
- Publication date Aug 11, 2005
- ASML NETHERLANDS B.V.
- Bod Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050146702
- Publication date Jul 7, 2005
- ASML NETHERLANDS B.V.
- Markus Franciscus Antonius Eurlings
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Assembly for detection of radiation flux and contamination of an op...
- Publication number 20050133727
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method and a substrate
- Publication number 20050042554
- Publication date Feb 24, 2005
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050024609
- Publication date Feb 3, 2005
- ASML NETHERLANDS B.V.
- Joannes Theodoor De Smit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050007570
- Publication date Jan 13, 2005
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stationary and dynamic radial transverse electric polarizer for hig...
- Publication number 20040227923
- Publication date Nov 18, 2004
- Donis George Flagello
- G02 - OPTICS
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20040227922
- Publication date Nov 18, 2004
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of fabricating an optical element, lithographic apparatus an...
- Publication number 20040120458
- Publication date Jun 24, 2004
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20040106068
- Publication date Jun 3, 2004
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20030227603
- Publication date Dec 11, 2003
- ASML NETHERLANDS, B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marcel Mathijs Theodore Marie Dierichs

Person

Patents Applicationslast 30 patents

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method and a substrate

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Diffuser unit, lithographic apparatus, method for homogenizing a be...

Use of a reticle absorber material in reducing aberrations

Device manufacturing method and a substrate

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Assembly for detection of radiation flux and contamination of an op...

Lithographic apparatus, device manufacturing method and a substrate

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Stationary and dynamic radial transverse electric polarizer for hig...

Lithographic apparatus and device manufacturing method

Method of fabricating an optical element, lithographic apparatus an...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method