Marco Baragona

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Delft, IT

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Patents Grantslast 30 patents

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Gas manifold, module for a lithographic apparatus, lithographic app...
- Patent number 8,675,169
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Frank Johannes Jacobus Van Boxtel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY