Marco Dienel

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Oederan, DE

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Patents Grantslast 30 patents

Information Patent Grant
Vibrating micromechanical system having beam-shaped element
- Patent number 8,887,571
- Issue date Nov 18, 2014
- Siemens Aktiengesellschaft
- Marco Dienel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
VIBRATING MICROMECHANICAL SYSTEM HAVING BEAM-SHAPED ELEMENT
- Publication number 20120017683
- Publication date Jan 26, 2012
- Marco Dienel
- B81 - MICRO-STRUCTURAL TECHNOLOGY