Marco G. H. Meijerink

Follow

Person

Den Haag, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Optical arrangement and EUV lithography device with at least one he...
- Patent number 7,959,310
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ARRANGEMENT AND EUV LITHOGRAPHY DEVICE WITH AT LEAST ONE HE...
- Publication number 20080143981
- Publication date Jun 19, 2008
- Carl Zeis SMT AG
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY