Marco H. P. Moers

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Patents Grantslast 30 patents

Information Patent Grant
Method of measuring aberration in an optical imaging system
- Patent number 6,897,947
- Issue date May 24, 2005
- ASML Netherlands B.V.
- Hans van der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,819,405
- Issue date Nov 16, 2004
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus, a grating module, a sensor modul...
- Patent number 6,650,399
- Issue date Nov 18, 2003
- ASML Netherlands B.V.
- Johannes Jacobus Matheus Baselmans
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring aberration in an optical imaging system
- Patent number 6,646,729
- Issue date Nov 11, 2003
- ASML Netherlands B.V.
- Hans van der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method of determining stray radiation lithographic projection appar...
- Publication number 20040160588
- Publication date Aug 19, 2004
- ASML NETHERLANDS B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020180943
- Publication date Dec 5, 2002
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus, a grating module, a sensor modul...
- Publication number 20020145717
- Publication date Oct 10, 2002
- Johannes Jacobus Matheus Baselmans
- G01 - MEASURING TESTING
Information Patent Application
Method of measuring aberration in an optical imaging system
- Publication number 20020008869
- Publication date Jan 24, 2002
- Hans Van der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY