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Marco Haubold
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for wafer bonding and compound semiconductor wafer
Patent number
12,068,296
Issue date
Aug 20, 2024
Infineon Technologies AG
Stefan Hampl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a moisture sensor at the wafer level and moist...
Patent number
11,428,661
Issue date
Aug 30, 2022
Infineon Technologies AG
Marco Haubold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stressed decoupled micro-electro-mechanical system sensor
Patent number
10,870,575
Issue date
Dec 22, 2020
Infineon Technologies Dresden GmbH & Co. KG
Horst Theuss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor device and manufacturing method
Patent number
10,386,255
Issue date
Aug 20, 2019
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor device, pressure sensor, microphone, and acceleration...
Patent number
10,329,140
Issue date
Jun 25, 2019
Infineon Technologies AG
Marco Haubold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE
Publication number
20240425361
Publication date
Dec 26, 2024
INFINEON TECHNOLOGIES AG
Björn Oliver Eversmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Apparatus Having Such a MEMS Device
Publication number
20230406694
Publication date
Dec 21, 2023
INFINEON TECHNOLOGIES AG
Christian Bretthauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Audio Device Including Such a MEMS Device
Publication number
20230412968
Publication date
Dec 21, 2023
INFINEON TECHNOLOGIES AG
Christian Bretthauer
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
METHOD FOR WAFER BONDING AND COMPOUND SEMICONDUCTOR WAFER
Publication number
20220238501
Publication date
Jul 28, 2022
Stefan Hampl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Producing a Moisture Sensor at the Wafer Level and Moist...
Publication number
20200166471
Publication date
May 28, 2020
INFINEON TECHNOLOGIES AG
Marco Haubold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRESSED DECOUPLED MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR
Publication number
20200002159
Publication date
Jan 2, 2020
Infineon Technologies Dresden GmbH & Co. KG
Horst THEUSS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE, PRESSURE SENSOR, MICROPHONE, ACCELERATION SEN...
Publication number
20180222744
Publication date
Aug 9, 2018
INFINEON TECHNOLOGIES AG
Marco Haubold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR DEVICE AND MANUFACTURING METHOD
Publication number
20180017456
Publication date
Jan 18, 2018
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
G01 - MEASURING TESTING
Information
Patent Application
Damping of a Sensor
Publication number
20180003503
Publication date
Jan 4, 2018
INFINEON TECHNOLOGIES AG
Marco Haubold
B81 - MICRO-STRUCTURAL TECHNOLOGY