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Beamlet blanker arrangement
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Patent number 8,258,484
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Issue date Sep 4, 2012
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Mapper Lithography IP B.V.
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Marco Jan Jaco Wieland
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B82 - NANO-TECHNOLOGY
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Projection lens arrangement
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Patent number 8,089,056
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Issue date Jan 3, 2012
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Mapper Lithography IP B.V.
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Marco Jan Jaco Wieland
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B82 - NANO-TECHNOLOGY
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Electron beam exposure system
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Patent number 7,091,504
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Issue date Aug 15, 2006
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Mapper Lithography IP B.V.
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Marco Jan-Jaco Wieland
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H01 - BASIC ELECTRIC ELEMENTS
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Modulator circuitry
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Patent number 7,019,908
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Issue date Mar 28, 2006
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Mapper Lithography IP B.V.
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Johannes Christiaan van 't Spijker
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H01 - BASIC ELECTRIC ELEMENTS
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Electron beam exposure system
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Patent number 6,897,458
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Issue date May 24, 2005
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Mapper Lithography IP B.V.
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Marco Jan-Jaco Wieland
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H01 - BASIC ELECTRIC ELEMENTS