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Marco Jassmann
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Neresheim-Dorfmerkingen, DE
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Patents Grants
last 30 patents
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Patent Grant
Optical component
Patent number
9,804,501
Issue date
Oct 31, 2017
Carl Zeiss SMT GmbH
Severin Waldis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical module for guiding a radiation beam
Patent number
9,116,440
Issue date
Aug 25, 2015
Carl Zeiss SMT GmbH
Markus Hauf
G02 - OPTICS
Information
Patent Grant
Method for moving an optical element of a projection exposure appar...
Patent number
8,879,046
Issue date
Nov 4, 2014
Carl Zeiss SMT GmbH
Karl-Eugen Aubele
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
OPTICAL COMPONENT
Publication number
20140327895
Publication date
Nov 6, 2014
Severin Waldis
G02 - OPTICS
Information
Patent Application
OPTICAL MODULE FOR GUIDING A RADIATION BEAM
Publication number
20140211187
Publication date
Jul 31, 2014
Carl Zeiss SMT GMBH
Markus Hauf
G02 - OPTICS
Information
Patent Application
METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPAR...
Publication number
20140078487
Publication date
Mar 20, 2014
Karl-Eugen Aubele
G02 - OPTICS