Marco Le Kluse

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Maassluls, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method of manufacturing an electrostatic...
- Patent number 8,476,167
- Issue date Jul 2, 2013
- ASML Netherlands B.V.
- Hubert Adriaan Van Mierlo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,528,935
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,245,357
- Issue date Jul 17, 2007
- ASML Netherlands B.V.
- Erwin Van Zwet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic clamp assembly for a lithographic apparatus
- Patent number 7,187,433
- Issue date Mar 6, 2007
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,041,989
- Issue date May 9, 2006
- ASML Netherlands B.V.
- Hendrik Antony Johannes Neerhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,897,945
- Issue date May 24, 2005
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatus and Method of Manufacturing an Electrostatic...
- Publication number 20110126406
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Hubert Adriaan VAN MIERLO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electrostatic clamp assembly for a lithographic apparatus
- Publication number 20050174555
- Publication date Aug 11, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050128459
- Publication date Jun 16, 2005
- ASML NETHERLANDS B.V.
- Erwin Van Zwet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20050128463
- Publication date Jun 16, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY