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VILLACH, AT
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for wafer wet processing
Patent number
9,997,379
Issue date
Jun 12, 2018
Lam Research AG
Harald Kraus
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR WAFER WET PROCESSING
Publication number
20120131815
Publication date
May 31, 2012
LAM RESEARCH AG
Harald KRAUS
H01 - BASIC ELECTRIC ELEMENTS