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Marcus Adrianus Ven De Kerkhof
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Helmond, NL
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last 30 patents
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Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20120300182
Publication date
Nov 29, 2012
ASML NETHERLANDS B.V.
Paul Christiaan HINNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Lithographic projection apparatus, a grating module, a sensor modul...
Publication number
20020145717
Publication date
Oct 10, 2002
Johannes Jacobus Matheus Baselmans
G01 - MEASURING TESTING