Marcus Carbery

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Clontarf, IE

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Patents Grantslast 30 patents

Information Patent Grant
Flexible temperature compensation systems and methods for substrate...
- Patent number 9,864,361
- Issue date Jan 9, 2018
- Lam Research Corporation
- Andrew D. Bailey
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
FLEXIBLE TEMPERATURE COMPENSATION SYSTEMS AND METHODS FOR SUBSTRATE...
- Publication number 20160370788
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- G05 - CONTROLLING REGULATING