Marcus Emile Joannes Boonman

Person

Waalre, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining a map, device manufacturing method, and lith...
- Patent number 7,649,635
- Issue date Jan 19, 2010
- ASML Netherlands B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,564,536
- Issue date Jul 21, 2009
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining a map, device manufacturing method, and lith...
- Patent number 7,292,351
- Issue date Nov 6, 2007
- ASML Netherlands B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method with feed-fo...
- Patent number 7,113,256
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly comprising a sensor for determining at least one of tilt a...
- Patent number 7,113,257
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Ralph Brinkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Off-axis leveling in lithographic projection apparatus
- Patent number 6,924,884
- Issue date Aug 2, 2005
- ASML Netherlands B.V.
- Marcus Emile Joannes Boonman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070103666
- Publication date May 10, 2007
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining a map, device manufacturing method, and lith...
- Publication number 20050186483
- Publication date Aug 25, 2005
- ASML NETHERLANDS B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Assembly comprising a sensor for determining at least one of tilt a...
- Publication number 20040257545
- Publication date Dec 23, 2004
- ASML NETHERLANDS B.V.
- Ralph Brinkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marcus Emile Joannes Boonman

Person

Patents Grantslast 30 patents

Method for determining a map, device manufacturing method, and lith...

Lithographic apparatus and device manufacturing method

Method for determining a map, device manufacturing method, and lith...

Lithographic apparatus and device manufacturing method with feed-fo...

Assembly comprising a sensor for determining at least one of tilt a...

Off-axis leveling in lithographic projection apparatus

Patents Applicationslast 30 patents

Lithographic apparatus and device manufacturing method

Method for determining a map, device manufacturing method, and lith...

Assembly comprising a sensor for determining at least one of tilt a...