Marcus Emile Joannes Boonman

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Off-axis levelling in lithographic projection apparatus
- Patent number 7,202,938
- Issue date Apr 10, 2007
- ASML Netherlands B.V.
- Theodorus M. Modderman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Off-axis leveling in lithographic projection apparatus
- Patent number 7,019,815
- Issue date Mar 28, 2006
- ASML Netherlands B.V.
- Johannes C. M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with improved exposure area focus, device ma...
- Patent number 6,741,331
- Issue date May 25, 2004
- ASML Netherlands B.V.
- Marcus Emile Joannes Boonman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Off-axis levelling in lithographic projection apparatus
- Patent number 6,674,510
- Issue date Jan 6, 2004
- ASML Netherlands B.V.
- Johannes C. M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for determining a map, device manufacturing method, and lith...
- Publication number 20080046183
- Publication date Feb 21, 2008
- ASML NETHERLANDS B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method with feed-fo...
- Publication number 20050179880
- Publication date Aug 18, 2005
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20050157281
- Publication date Jul 21, 2005
- ASML NETHERLANDS B.V.
- Johannes C.M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining a map, device manufacturing method, and lith...
- Publication number 20050134865
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Hielke Schoonewelle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20050088638
- Publication date Apr 28, 2005
- ASML NETHERLANDS B.V.
- Johannes C.M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20040130691
- Publication date Jul 8, 2004
- ASML NETHERLANDS B.V.
- Marcus Emile Joannes Boonman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20040080737
- Publication date Apr 29, 2004
- ASML NETHERLANDS B.V.
- Johannes Christiaan Maria Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020167651
- Publication date Nov 14, 2002
- ASML NETHERLANDS B.V.
- Marcus Emile Joannes Boonman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marcus Emile Joannes Boonman

Person

Patents Grantslast 30 patents

Off-axis levelling in lithographic projection apparatus

Off-axis leveling in lithographic projection apparatus

Lithographic apparatus with improved exposure area focus, device ma...

Off-axis levelling in lithographic projection apparatus

Patents Applicationslast 30 patents

Method for determining a map, device manufacturing method, and lith...

Lithographic apparatus and device manufacturing method with feed-fo...

Off-axis levelling in lithographic projection apparatus

Method for determining a map, device manufacturing method, and lith...

Off-axis levelling in lithographic projection apparatus

Off-axis levelling in lithographic projection apparatus

Off-axis levelling in lithographic projection apparatus

Lithographic apparatus, device manufacturing method, and device man...