Marcus Musselman

Person

Oakland, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 11,704,463
- Issue date Jul 18, 2023
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for controlling wafer fabrication process
- Patent number 11,056,405
- Issue date Jul 6, 2021
- Lam Research Corporation
- Marcus Musselman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for calibrating scalar field contribution value...
- Patent number 11,029,668
- Issue date Jun 8, 2021
- Lam Research Corporation
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for performing edge ring characterization
- Patent number 11,011,353
- Issue date May 18, 2021
- Lam Research Corporation
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,997,345
- Issue date May 4, 2021
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for determining field non-uniformities of a wafer...
- Patent number 10,763,142
- Issue date Sep 1, 2020
- Lam Research Corporation
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,572,697
- Issue date Feb 25, 2020
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for calibrating scalar field contribution value...
- Patent number 10,386,821
- Issue date Aug 20, 2019
- Lam Research Corporation
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for aligning measurement device in substrate pr...
- Patent number 10,312,121
- Issue date Jun 4, 2019
- Lam Research Corporation
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20210216695
- Publication date Jul 15, 2021
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20200218844
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Controlling Wafer Fabrication Process
- Publication number 20200091017
- Publication date Mar 19, 2020
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUE...
- Publication number 20190332094
- Publication date Oct 31, 2019
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20190311083
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PR...
- Publication number 20170287753
- Publication date Oct 5, 2017
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION
- Publication number 20170287682
- Publication date Oct 5, 2017
- LAM RESEARCH CORPORATION
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUE...
- Publication number 20160370795
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING FIELD NON-UNIFORMITIES OF A WAFER...
- Publication number 20160370796
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G05 - CONTROLLING REGULATING

Marcus Musselman

Person

Patents Grantslast 30 patents

Method of etch model calibration using optical scatterometry

Methods and systems for controlling wafer fabrication process

Systems and methods for calibrating scalar field contribution value...

Systems and methods for performing edge ring characterization

Method of etch model calibration using optical scatterometry

System and method for determining field non-uniformities of a wafer...

Method of etch model calibration using optical scatterometry

Systems and methods for calibrating scalar field contribution value...

Systems and methods for aligning measurement device in substrate pr...

Patents Applicationslast 30 patents

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

Methods and Systems for Controlling Wafer Fabrication Process

SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUE...

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PR...

SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION

SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUE...

SYSTEM AND METHOD FOR DETERMINING FIELD NON-UNIFORMITIES OF A WAFER...