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Dongen, NL
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Patents Grants
last 30 patents
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Patent Grant
Radiation collector, radiation source and lithographic apparatus
Patent number
9,983,482
Issue date
May 29, 2018
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Radiation Collector, Radiation Source and Lithographic Apparatus
Publication number
20160026091
Publication date
Jan 28, 2016
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
G02 - OPTICS