Marcus Theodoor Wilhelmus Van Der Heijden

Person

Dilsen-Stokkem (Elen), BE

People

Patents Grantslast 30 patents

Information Patent Grant
Method of preparing a substrate for lithography, a substrate, a dev...
- Patent number 8,114,568
- Issue date Feb 14, 2012
- AMSL Netherlands B.V.
- Marcus Theodoor Wilhelmus Van Der Heijden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pre-aligning a substrate in a lithographic apparatus, device manufa...
- Patent number 7,349,071
- Issue date Mar 25, 2008
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20120281192
- Publication date Nov 8, 2012
- TNO
- Wilhelmus Johannes Maria De Laat
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF PREPARING A SUBSTRATE FOR LITHOGRAPHY, A SUBSTRATE, A DEV...
- Publication number 20120129098
- Publication date May 24, 2012
- ASML NETHERLANDS B.V.
- Marcus Theodoor Wilhelmus VAN DER HEIJDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBER WITH A CLEANING SURFACE AND A METHOD OF REMOVING CONTAMINATION
- Publication number 20100141910
- Publication date Jun 10, 2010
- ASML NETHERLANDS B.V.
- Marcus Theodoor Wilhelmus VAN DER HEIJDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of preparing a substrate for lithography, a substrate, a dev...
- Publication number 20090201485
- Publication date Aug 13, 2009
- ASML NETHERLANDS B.V.
- Marcus Theodoor Wilhelmus Van Der Heijden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography apparatus
- Publication number 20090115979
- Publication date May 7, 2009
- ASML NETHERLANDS B.V.
- Marcus Theodoor Wilhelmus Van Der Heijden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrates and methods of using those substrates
- Publication number 20090014030
- Publication date Jan 15, 2009
- ASML NETHERLANDS B.V.
- Anthonius Martinus Cornelis Petrus De Jong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Marcus Theodoor Wilhelmus Van Der Heijden

Person

Patents Grantslast 30 patents

Method of preparing a substrate for lithography, a substrate, a dev...

Pre-aligning a substrate in a lithographic apparatus, device manufa...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD

METHOD OF PREPARING A SUBSTRATE FOR LITHOGRAPHY, A SUBSTRATE, A DEV...

MEMBER WITH A CLEANING SURFACE AND A METHOD OF REMOVING CONTAMINATION

Method of preparing a substrate for lithography, a substrate, a dev...

Immersion lithography apparatus

Substrates and methods of using those substrates