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Marek Zwyno
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San Jose, CA, US
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last 30 patents
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Patent Grant
Z-stage with dynamically driven stage mirror and chuck assembly
Patent number
8,390,789
Issue date
Mar 5, 2013
KLA-Tencor Technologies Corporation
Salam Harb
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Z-stage with dynamically driven stage mirror and chuck assembly
Patent number
7,800,735
Issue date
Sep 21, 2010
KLA-Tencor Technologies Corporation
Salam Harb
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY
Publication number
20100295258
Publication date
Nov 25, 2010
KLA-Tencor Corporation
Salam Harb
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY
Publication number
20070247778
Publication date
Oct 25, 2007
KLA-Tencor Technologies Corporation
Salam Harb
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY