Maria Isabel Catalina Caballero

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Voorburg, NL

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Patents Applicationslast 30 patents

Information Patent Application
PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY
- Publication number 20110188011
- Publication date Aug 4, 2011
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY