TREA

Maria Paola Pozzoli

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  • Santa Cruz, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for post-etch cleans
    • Patent number 8,058,181
    • Issue date Nov 15, 2011
    • Novellus Systems, Inc.
    • David L. Chen
    • B08 - CLEANING
  • Information Patent Grant

    Method for post-etch cleans
    • Patent number 7,569,492
    • Issue date Aug 4, 2009
    • Novellus Systems, Inc.
    • David L. Chen
    • B08 - CLEANING
  • Information Patent Grant

    Methods for post etch cleans
    • Patent number 7,390,755
    • Issue date Jun 24, 2008
    • Novellus Systems, Inc.
    • David L. Chen
    • B08 - CLEANING