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Marian Zielinski
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Washington Twp., NJ, US
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last 30 patents
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Patent Grant
Transport system for wafer processing line
Patent number
6,183,615
Issue date
Feb 6, 2001
Tokyo Electron Limited
Tugrul Yasar
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Multiple single-wafer loadlock wafer processing apparatus and loadi...
Patent number
5,944,857
Issue date
Aug 31, 1999
Tokyo Electron Limited
Richard C. Edwards
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Magnetic device for rotating a substrate
Patent number
5,795,448
Issue date
Aug 18, 1998
Sony Corporation
Steven Hurwitt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...