Marie J. Welsch

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Georgetown, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam implant current, spot width and position tuning
- Patent number 7,442,944
- Issue date Oct 28, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam contamination determination
- Patent number 7,402,820
- Issue date Jul 22, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Russell Low
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Ion beam contamination determination
- Publication number 20070241276
- Publication date Oct 18, 2007
- Russell Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam implant current, spot width and position tuning
- Publication number 20060076510
- Publication date Apr 13, 2006
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS