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Marie Mitchel
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Phoenix, AZ, US
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last 30 patents
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Patent Grant
Method for chemical mechanical planarization (CMP) and chemical mec...
Patent number
6,875,087
Issue date
Apr 5, 2005
Novellus Systems, Inc.
Marie Mitchel
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Method for chemical mechanical planarization (CMP) and chemical mec...
Publication number
20040229550
Publication date
Nov 18, 2004
Marie Mitchel
B08 - CLEANING