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Marijn Kessels
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Geldrop, NL
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last 30 patents
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Patent Grant
Positioning system and a method for positioning a substage with res...
Patent number
8,896,811
Issue date
Nov 25, 2014
ASML Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuator, positioning system and lithographic apparatus
Patent number
8,472,010
Issue date
Jun 25, 2013
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
POSITIONING SYSTEM AND A METHOD FOR POSITIONING A SUBSTAGE WITH RES...
Publication number
20110075122
Publication date
Mar 31, 2011
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTUATOR, POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20110069293
Publication date
Mar 24, 2011
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY