Marika Juppo

Follow

Person

Espoo, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Method for preparing metal nitride thin films
- Patent number 6,706,115
- Issue date Mar 16, 2004
- ASM International N.V.
- Markku Leskelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for preparing metal nitride thin films
- Publication number 20020182320
- Publication date Dec 5, 2002
- Markku Leskela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...