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Mariko Ozawa
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Minato-ku, JP
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last 30 patents
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Patent Grant
Method for manufacturing semiconductor device
Patent number
8,951,908
Issue date
Feb 10, 2015
Tokyo Electron Limited
Kenichi Hara
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20140206187
Publication date
Jul 24, 2014
TOKYO ELECTRON LIMITED
Kenichi HARA
H01 - BASIC ELECTRIC ELEMENTS