Membership
Tour
Register
Log in
Mariko Shibata
Follow
Person
Miyagi-gun, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method, system and program
Patent number
8,475,623
Issue date
Jul 2, 2013
Tokyo Electron Limited
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, system and program
Patent number
8,257,601
Issue date
Sep 4, 2012
Tokyo Electron Limited
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
Publication number
20120292290
Publication date
Nov 22, 2012
TOKYO ELECTRON LIMITED
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
Publication number
20110171830
Publication date
Jul 14, 2011
TOKYO ELECTRON LIMITED
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method, system and program
Publication number
20060090703
Publication date
May 4, 2006
TOKYO ELECTRON LIMITED
Seiichi Kaise
H01 - BASIC ELECTRIC ELEMENTS