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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and method
Patent number
11,630,399
Issue date
Apr 18, 2023
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
Patent number
11,300,890
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
11,281,115
Issue date
Mar 22, 2022
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device cooling apparatus
Patent number
10,990,025
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Laurentius Johannes Adrianus Van Bokhoven
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,551,752
Issue date
Feb 4, 2020
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
Patent number
10,520,837
Issue date
Dec 31, 2019
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device cooling apparatus
Patent number
10,222,713
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Laurentius Johannes Adrianus Van Bokhoven
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas flow optimization in reticle stage environment
Patent number
10,031,428
Issue date
Jul 24, 2018
ASML Netherlands B.V.
Koen Cuypers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
Patent number
9,897,928
Issue date
Feb 20, 2018
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,632,435
Issue date
Apr 25, 2017
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20230273533
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20220206400
Publication date
Jun 30, 2022
ASML NETHERLANDS B.V.
Nicolaas TEN KATE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20200142325
Publication date
May 7, 2020
ASML NETHERLANDS B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
Publication number
20200124993
Publication date
Apr 23, 2020
AS ML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE COOLING APPARATUS
Publication number
20190196345
Publication date
Jun 27, 2019
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE COOLING APPARATUS
Publication number
20180356740
Publication date
Dec 13, 2018
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, support table for a lithographic apparatus...
Publication number
20180284627
Publication date
Oct 4, 2018
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas Flow Optimization in Reticle Stage Environment
Publication number
20150355557
Publication date
Dec 10, 2015
ASML NETHERLANDS B.V.
Koen CUYPERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
Publication number
20130045447
Publication date
Feb 21, 2013
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20110222032
Publication date
Sep 15, 2011
ASML NETHERLANDS B.V.
Nicolaas TEN KATE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20110222033
Publication date
Sep 15, 2011
ASML NETHERLANDS B.V.
Nicolaas TEN KATE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20100302518
Publication date
Dec 2, 2010
ASML NETHERLANDS B.V.
Jan VAN EIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY