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Marinus JOCHEMSEN
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Santa Clara, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Selection of measurement locations for patterning processes
Patent number
11,681,229
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Hans Van Der Laan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Selection of measurement locations for patterning processes
Patent number
10,962,886
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Hans Van Der Laan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Focus-dose co-optimization based on overlapping process window
Patent number
10,459,345
Issue date
Oct 29, 2019
ASML Netherlands B.V.
Stefan Hunsche
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SELECTION OF MEASUREMENT LOCATIONS FOR PATTERNING PROCESSES
Publication number
20230333481
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Hans VAN DER LAAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELECTION OF MEASUREMENT LOCATIONS FOR PATTERNING PROCESSES
Publication number
20210216017
Publication date
Jul 15, 2021
ASML NETHERLANDS B.V.
Hans VAN DER LAAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELECTION OF MEASUREMENT LOCATIONS FOR PATTERNING PROCESSES
Publication number
20190025705
Publication date
Jan 24, 2019
ASML NETHERLANDS B.V.
Hans VAN DER LAAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FOCUS-DOSE CO-OPTIMIZATION BASED ON OVERLAPPING PROCESS WINDOW
Publication number
20180074413
Publication date
Mar 15, 2018
Stefan HUNSCHE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY