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Marinus Johannes Maria Van Dam
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology apparatus
Patent number
11,940,739
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus
Patent number
11,549,806
Issue date
Jan 10, 2023
ASML Netherland B.V.
Marinus Johannes Maria Van Dam
G01 - MEASURING TESTING
Information
Patent Grant
Metrology apparatus
Patent number
11,262,661
Issue date
Mar 1, 2022
ASML Netherlands B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Grant
Metrology apparatus
Patent number
10,895,452
Issue date
Jan 19, 2021
ASML Netherlands B.V.
Marinus Johannes Maria Van Dam
G02 - OPTICS
Information
Patent Grant
Inspection apparatus having non-linear optics
Patent number
10,809,193
Issue date
Oct 20, 2020
ASML Netherlands B.V.
Marinus Johannes Maria Van Dam
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,775,704
Issue date
Sep 15, 2020
ASML Netherlands B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Grant
Method of optimizing the position and/or size of a measurement illu...
Patent number
10,488,765
Issue date
Nov 26, 2019
ASML Netherlands B.V.
Johan Maria Van Boxmeer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,365,565
Issue date
Jul 30, 2019
ASML Netherlands B.V.
Nitesh Pandey
G02 - OPTICS
Information
Patent Grant
Actuation mechanism, optical apparatus and lithography apparatus
Patent number
9,927,711
Issue date
Mar 27, 2018
ASML Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuation mechanism, optical apparatus, lithography apparatus and m...
Patent number
9,785,051
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Jan Bernard Plechelmus Van Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system, lithographic apparatus and method of adjusting...
Patent number
8,867,021
Issue date
Oct 21, 2014
ASML Netherlands B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Parameter control in a lithographic apparatus using polarization
Patent number
8,675,176
Issue date
Mar 18, 2014
ASML Netherlands B.V.
Marinus Johanes Maria Van Dam
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Gas manifold, module for a lithographic apparatus, lithographic app...
Patent number
8,675,169
Issue date
Mar 18, 2014
ASML Netherlands B.V.
Frank Johannes Jacobus Van Boxtel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for measuring light scattered by an information support
Patent number
5,111,037
Issue date
May 5, 1992
Oce-Nederland B.V.
Emile E. M. Boderie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Metrology Apparatus
Publication number
20240184218
Publication date
Jun 6, 2024
ASML NETHERLANDS B.V.
Nitesh PANDEY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WAVELENGTH SELECTION MODULE, ILLUMINATION SYSTEM AND METROLOGY SYSTEM
Publication number
20220299365
Publication date
Sep 22, 2022
ASML NETHERLANDS B.V.
Gerbrand VAN DER ZOUW
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus
Publication number
20210123724
Publication date
Apr 29, 2021
ASML NETHERLANDS B.V.
Marinus Johannes Maria VAN DAM
G02 - OPTICS
Information
Patent Application
Metrology Apparatus
Publication number
20200072599
Publication date
Mar 5, 2020
ASML NETHERLANDS B.V.
Marinus Johannes Maria VAN DAM
G02 - OPTICS
Information
Patent Application
Metrology Apparatus
Publication number
20190384184
Publication date
Dec 19, 2019
ASML NETHERLANDS B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20190346771
Publication date
Nov 14, 2019
ASML NETHERLANDS B.V.
Nitesh PANDEY
G02 - OPTICS
Information
Patent Application
Inspection Apparatus Having Non-Linear Optics
Publication number
20190310190
Publication date
Oct 10, 2019
ASML NETHERLANDS B.V.
Marinus Johannes Maria VAN DAM
G01 - MEASURING TESTING
Information
Patent Application
Method of Optimizing the Position and/or Size of a Measurement Illu...
Publication number
20190107786
Publication date
Apr 11, 2019
ASML NETHERLANDS B.V.
Johan Maria VAN BOXMEER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20170242343
Publication date
Aug 24, 2017
ASML NETHERLANDS B.V.
Nitesh PANDEY
G02 - OPTICS
Information
Patent Application
Actuation Mechanism, Optical Apparatus and Lithography Apparatus
Publication number
20160313649
Publication date
Oct 27, 2016
ASML, Netherlands B.V.
Sven Antoin Johan HOL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND M...
Publication number
20150277233
Publication date
Oct 1, 2015
ASML NETHERLANDS B.V.
Jan Bernard Plechelmus Van Schoot
G01 - MEASURING TESTING
Information
Patent Application
Optical element for use in lithography apparatus and method of cond...
Publication number
20070058151
Publication date
Mar 15, 2007
ASML NETHERLANDS B.V.
Markus Franciscus Antonius Eurlings
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and method for its use
Publication number
20060215141
Publication date
Sep 28, 2006
ASML NETHERLANDS B.V.
Marinus Johannes Maria Van Dam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Parameter control in a lithographic apparatus using polarization
Publication number
20060192149
Publication date
Aug 31, 2006
ASML NETHERLANDS B.V.
Marinus Johannes Maria Van Dam
B82 - NANO-TECHNOLOGY